기계 유형
magnetron sputtering coater
Applicable Industries
제조 식물
차원 (L*W*H)
600mm X 650mm X 1280mm
Sample stage Size
150mm,20rpm adjustable,MAX500C
Magnetron Sputtering target head
2"*3 (1",2" optional)
Water chiller
Circulating water chiller with flow rate of 10L/min
Chamber size
300mm*340mm,Stainless steel,Watch window
Mass flowmeter
One-channel,200sccm Ar;
Vacuum pump
Molecular pump+rotary vane pump
Vacuum measurement:
Compound vacuum gauge