Product name
MPCVD single crystal diamond deposition equipment
microwave frequency
2450±25MHz
output power of Microwave system
0.6kw~6kw continuous adjustable
Microwave tuning
3-stub tuner Mode conversion antenna
vacuum system
Operating pressure range 10~250Torr
Vacuum reactor
double-layer water-cooled stainless steel
Sample stage
dia. 100mm,Adjustable height range 0~70mm
Substrate temperature
250~1400℃