기계 유형
magnetron sputtering coater
Applicable Industries
제조 식물
차원 (L*W*H)
1090mm X 900mm X 1250mm
Product name
Three-target magnetron sputtering coater with vibrating sample stage
Sample stage size
150mm dia.
Sample stage size vibration method
Inverter motor drive gear
Magnetron sputtering head
Three 2-inch magnetron sputtering heads
Vacuum chamber size
300mm Dia.X 340mm H
Gas flow controller
1 road 200sccm Ar
Vacuum pump
a molecular pump system, pumping speed 600L/S
Thickness meter
A quartz vibrating film thickness gauge
Sputtering power supply
2DC*500W 1RF*500W