기계 유형
Multi Source Thermal Evaporator
Applicable Industries
제조 식물
차원 (L*W*H)
1000mm* 800mm * 1500mm
Product name
Multi evaporation sources high vacuum evaporation coating instrument
Application
A variety of refractory metals
Kinds of coating
thermal evaporation
Evaporation source
tungsten Boat
Chamber
Dia. 300mm X 400mm,304 stainless steel
Film thickness control
Crystal vibrating film thickness measuring
Flowmeter
One way mass flowmeter 500sccm Ar gas
Control System
PLC automatic control