기계 유형
lab vacuum coating machine
코어 부품
펌프, DC/RF power supply
차원 (L*W*H)
550mm*550mm*1100mm
name
small 2-target magnetron sputtering coater with RF&DC power supply
Sample stage
diam150mm;Up to 500℃;Rotating speed:0-20 adjustable
Magnetron Sputtering target head
two-target,2-inch
Vacuum chamber
Stainless steel
Mass flowmeter
2 channels; measuring range 100SCCM; 100SCCM
Vacuum pump
Molecular pump+oil-free diaphragm pump
Pumping rate
Oil-free pump 0.49L/s Molecular pump: 40L/S
Sputtering power
DC power supply 500W RF power supply 500W
포장 세부정보
Dual-Head Magnetron Plasma Sputtering system
Plastic paper inside,polyfoam filled,wooden box outside
항구
Zhengzhou,QingdaoTianjin, Beijing ,Ningbo,etc.